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Home › Methods of forming an electrically conductive buried line and an electrical contact thereto and methods of forming a buried access line and an electrical contact thereto

Methods of forming an electrically conductive buried line and an electrical contact thereto and methods of forming a buried access line and an electrical contact thereto

US Patent 8470654 · Granted Jun 25, 2013

Estimated economic value: $5,511,000 ⓘ

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