Assignee
- Semiconductor Manufacturing International (Shanghai)
- Semiconductor Manufacturing International (Beijing)
Inventors
- Min-hwa Chi (273 patents)
- Xiaohui HUANG (8 patents)
- Lijun Song (15 patents)
- Jingang Wu (8 patents)
- Deyuan Xiao (172 patents)
US Patent 8451646 · Granted May 28, 2013