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Home › Method and apparatus for enhancing signal strength for improved generation and placement of model-based sub-resolution assist features (MB-SRAF)

Method and apparatus for enhancing signal strength for improved generation and placement of model-based sub-resolution assist features (MB-SRAF)

US Patent 8443312 · Granted May 14, 2013

Estimated economic value: $5,174,000 ⓘ

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