Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Optical system, exposure apparatus, and method of manufacturing electronic device

Optical system, exposure apparatus, and method of manufacturing electronic device

US Patent 8421998 · Granted Apr 16, 2013

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Processing apparatus, and manufacturing method of movable body2025
Processing apparatus and method using irradiation apparatus having a partition m2025
Processing apparatus, and manufacturing method of movable body2024
Processing apparatus, and manufacturing method of movable body2024
Flare-measuring mask, flare-measuring method, and exposure method2016
Illumination optical system, exposure apparatus, and exposure method2015
Flare-measuring mask, flare-measuring method, and exposure method2015
Gas generator2014
Reflective imaging optical system, exposure apparatus, and method for producing 2014
Measuring member, sensor, measuring method, exposure apparatus, exposure method,2014
Multilayer-film reflective mirror, exposure apparatus, device manufacturing meth2012
Surface-corrected multilayer-film mirrors with protected reflective surfaces, ex2011