Ion implant apparatus and method of ion implantation

Assignee

• Gtat

Inventors

• Theodore H. Smick (50 patents)
• Geoffrey Ryding (54 patents)
• Takao Sakase (31 patents)
• William H. Park (19 patents)
• Joseph Gillespie (14 patents)
• Ronald Horner (13 patents)
• Paul Eide (7 patents)

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