Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Resist composition and method of forming resist pattern

Resist composition and method of forming resist pattern

US Patent 8354218 · Granted Jan 15, 2013

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Film cleaning solution and method for cleaning film2025
Cleaning composition and cleaning method for component of semiconductor manufact2024
Cleaning composition, cleaning method, and method for manufacturing semiconducto2022
Washing method, washing device, storage medium, and washing composition2022
Method for removing organic cured film on substrate, and acidic cleaning liquid2022
Hydrogen detection element, method for manufacturing hydrogen detection element,2021
Polyimide-based resin film cleaning liquid, method for cleaning polyimide-based 2018
Method of forming pattern2016
Resist composition, compound, polymeric compound and method of forming resist pa2016
Positive resist composition and method of forming resist pattern2016
Method of producing metal complex-supporting mesoporous material2015
Method for producing substrate having dispersed particles of dendrimer compound 2015