Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate processing apparatus and semiconductor device producing method

Substrate processing apparatus and semiconductor device producing method

US Patent 8251012 · Granted Aug 28, 2012

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Batch-type remote plasma processing apparatus2016
Batch-type remote plasma processing apparatus2015
Substrate processing apparatus2014
Batch-type remote plasma processing apparatus2013
Substrate processing apparatus2013
Substrate processing apparatus2013
Substrate processing apparatus2012
Substrate processing apparatus and reaction container2012
Substrate processing apparatus2012
Substrate processing apparatus and method of manufacturing semiconductor device2012
Substrate processing apparatus and reaction container2011
Batch-type remote plasma processing apparatus2011