Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Cleaning apparatus for exposure apparatus and exposure apparatus

Cleaning apparatus for exposure apparatus and exposure apparatus

US Patent 8149378 · Granted Apr 3, 2012

Estimated economic value: $82,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Mask blank substrate, substrate with multilayer reflective film, reflective mask2025
Communication system2025
Vehicle-mounted relay device2025
Image forming apparatus and mail transmission and reception control method for a2025
Communication system2025
Liquid crystal panel and three-dimensional display device2024
Liquid crystal display device2024
Liquid crystal display device2024
Information processing apparatus, information processing method, and program2024
Radio terminal, base station, and method therefor2024
Non-aqueous electrolyte secondary battery separator, non-aqueous electrolyte sec2024
Base station, radio terminal, and methods therefor2024