{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Method and apparatus for residue detection in the edge deleted area of a substrate", "item": "https://www.patentleaderboard.com/patent/8111390"}]}
Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for residue detection in the edge deleted area of a substrate

Method and apparatus for residue detection in the edge deleted area of a substrate

US Patent 8111390 · Granted Feb 7, 2012

Estimated economic value: $11,451,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Synchronous business process execution engine for action orchestration in a sing2025
Pulsed illumination for fluid inspection2024
Edge inspection of silicon wafers by image stacking2024
High speed substrate sorter2024
Inspection system2024
Method and apparatus for continuous substrate cassette loading2024
Compact apparatus for batch vial inspection2024
Linear sorter using vacuum belt2024
Method and system for inspection of products2023
Method and apparatus for continuous substrate cassette loading2023
Conveyor inspection system, substrate rotator, and test system having the same2022
Substrate tilt control in high speed rotary sorter2021