Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Silocon wafer supporting method, heat treatment jig and heat-treated wafer

Silocon wafer supporting method, heat treatment jig and heat-treated wafer

US Patent 8067820 · Granted Nov 29, 2011

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Polishing head, polishing apparatus, and method of manufacturing semiconductor w2025
Information processing system, information processing method, and program2024
Liquid chromatograph with improved defect elimination2024
Polishing head, wafer polishing apparatus using the same, and wafer polishing me2023
Susceptor and epitaxial growth device2022
Analyzing device system and program for the system2019
Information display processing device and control program for information displa2019
Data processing system and method for chromatograph2017
Epitaxial silicon wafer and production method thereof2015
Silicon wafer and method of manufacturing same2014
Tray for CVD and method for forming film using same2014
Epitaxial silicon wafer and production method thereof2011