Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Etching apparatus and method for semiconductor device

Etching apparatus and method for semiconductor device

US Patent 8062538 · Granted Nov 22, 2011

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma processing equipment2025
Lamp for a vehicle2025
Lamp for a vehicle2025
Lamp for a vehicle2025
Plasma etching apparatus and method for operating the same2024
Inductively coupled plasma processing apparatus2023
Method for fabricating semiconductor device2023
Device for opening and closing tailgate2023
Plasma processing equipment2022
Semiconductor device and method for fabricating the same2022
Apparatus for monitoring process chamber2021
Semiconductor manufacturing device and method of operating the same2021