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Home › MEMS vibrating structure using a single-crystal piezoelectric thin-film layer having domain inversions

MEMS vibrating structure using a single-crystal piezoelectric thin-film layer having domain inversions

US Patent 8035280 · Granted Oct 11, 2011

Estimated economic value: $6,257,000 ⓘ

Assignee

Rf Micro Devices

Inventors

Sheng-Shian Li (18 patents)
Seungbae Lee (22 patents)
Kushal Bhattacharjee (32 patents)

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