Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984863 | Sensor with resonator supported on a substrate | Mihir S. Patel | 2024-05-14 |
| 11588466 | Guided wave devices with selectively loaded piezoelectric layers | — | 2023-02-21 |
| 11545955 | Plate wave devices with wave confinement structures and fabrication methods | — | 2023-01-03 |
| 11476827 | Multi-frequency guided wave devices and fabrication methods | — | 2022-10-18 |
| 10938367 | Solidly mounted layer thin film device with grounding layer | Sergei Zhgoon | 2021-03-02 |
| 10530329 | Guided wave devices with selectively thinned piezoelectric layers | — | 2020-01-07 |
| 10389332 | Plate wave devices with wave confinement structures and fabrication methods | — | 2019-08-20 |
| 10374573 | Plate wave devices with wave confinement structures and fabrication methods | — | 2019-08-06 |
| 10348269 | Multi-frequency guided wave devices and fabrication methods | — | 2019-07-09 |
| 10326426 | Guided wave devices with selectively loaded piezoelectric layers | — | 2019-06-18 |
| 10305443 | Mixed domain guided wave devices utilizing embedded electrodes | — | 2019-05-28 |
| 10305442 | Guided wave devices with sensors utilizing embedded electrodes | — | 2019-05-28 |
| 10211806 | Guided wave devices with embedded electrodes and non-embedded electrodes | — | 2019-02-19 |
| 9998088 | Enhanced MEMS vibrating device | Sergei Zhgoon | 2018-06-12 |
| 9991872 | MEMS resonator with functional layers | — | 2018-06-05 |
| 9466430 | Variable capacitor and switch structures in single crystal piezoelectric MEMS devices using bimorphs | — | 2016-10-11 |
| 9391588 | MEMS vibrating structure using an orientation dependent single-crystal piezoelectric thin film layer | Sergei Zhgoon | 2016-07-12 |
| 9385685 | MEMS vibrating structure using an orientation dependent single-crystal piezoelectric thin film layer | Sergei Zhgoon | 2016-07-05 |
| 9369105 | Method for manufacturing a vibrating MEMS circuit | Sheng-Shian Li, Seungbae Lee | 2016-06-14 |
| 9117593 | Tunable and switchable resonator and filter structures in single crystal piezoelectric MEMS devices using bimorphs | — | 2015-08-25 |
| 8529986 | Layer acoustic wave device and method of making the same | — | 2013-09-10 |
| 8490260 | Method of manufacturing SAW device substrates | Sergei Zhgoon | 2013-07-23 |
| 8278802 | Planarized sacrificial layer for MEMS fabrication | Seungbae Lee, Sheng-Shian Li | 2012-10-02 |
| 8035280 | MEMS vibrating structure using a single-crystal piezoelectric thin-film layer having domain inversions | Sheng-Shian Li, Seungbae Lee | 2011-10-11 |
| 8011074 | Method for manufacture of piezoelectric substrate for a saw device | Sergei Zhgoon | 2011-09-06 |