Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › High aspect ratio all SiGe capacitively coupled MEMS devices

High aspect ratio all SiGe capacitively coupled MEMS devices

US Patent 8022491 · Granted Sep 20, 2011

Estimated economic value: $8,220,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Signal power validator2025
Method of manufacturing and packaging silicon photonics integrated circuit dies 2023
Embedded microelectromechanical systems (MEMS) semiconductor substrate and relat2014
Embedded microelectromechanical systems (MEMS) semiconductor substrate and relat2014
Method of forming a die having an IC region adjacent a MEMS region2014
Method of forming a die having an IC region adjacent a MEMS region2014
MEMS packaging scheme using dielectric fence2014
MEMS packaging scheme using dielectric fence2014
High aspect ratio capacitively coupled MEMS devices2014
High aspect ratio capacitively coupled MEMS devices2014
High aspect ratio capacitively coupled MEMS devices2013
High aspect ratio capacitively coupled MEMS devices2013