Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for imprint lithography at constant temperature

Method for imprint lithography at constant temperature

US Patent 7972553 · Granted Jul 5, 2011

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Mounting and demolding device2020
Methods and processes for modifying polymer material surface interactions2015
Process and method for modifying polymer film surface interaction2013
Nano imprinting method and apparatus2012
Method, system and storage medium for implementing a message board cache system2012
Device and method for large area lithography2012
Device and method for large area lithography2012
Metal mold for use in imprinting processes2012
Metal mold for use in imprinting processes2012
Means for transferring a pattern to an object2012
Device and method for lithography2011
Device and method for lithography2011