| 10737412 |
Mounting and demolding device |
Goran Larsson |
2020-08-11 |
| 9063408 |
Methods and processes for modifying polymer material surface interactions |
Jakob Nilsson, Matthias Keil, Johan Ring |
2015-06-23 |
| 8426025 |
Process and method for modifying polymer film surface interaction |
Matthias Keil, Jakob Nilsson, Johan Ring |
2013-04-23 |
| 8277717 |
Nano imprinting method and apparatus |
— |
2012-10-02 |
| 8147235 |
Device and method for large area lithography |
Marc Beck |
2012-04-03 |
| 8119197 |
Metal mold for use in imprinting processes |
Matthias Keil, Göran Frennesson, Marc Beck |
2012-02-21 |
| 7997890 |
Device and method for lithography |
Marc Beck |
2011-08-16 |
| 7972553 |
Method for imprint lithography at constant temperature |
Marc Beck, Erik Bolmsjö, Erik Theander |
2011-07-05 |
| 7854873 |
Imprint stamp comprising cyclic olefin copolymer |
Marc Beck, Matthias Keil |
2010-12-21 |
| 7717693 |
Modified metal mold for use in imprinting processes |
Matthias Keil, Göran Frennesson, Marc Beck |
2010-05-18 |
| 7704425 |
Pattern replication with intermediate stamp |
Anette Löfstrand, Erik Bolmsjö, Erik Theander, Marc Beck |
2010-04-27 |
| 7670452 |
Separation apparatus and method |
Mattias Habenicht |
2010-03-02 |
| 7195734 |
Device and method in connection with the production of structures |
— |
2007-03-27 |
| 7165957 |
Device for transferring a pattern to an object |
Lars Montelius, Thord Stjernholm |
2007-01-23 |
| 7137336 |
Stamp having an antisticking layer and a method of forming of repairing such a stamp |
Torbjörn Ling |
2006-11-21 |
| 7041228 |
Substrate for and a process in connection with the product of structures |
— |
2006-05-09 |
| 7022465 |
Method in connection with the production of a template and the template thus produced |
— |
2006-04-04 |
| 6923930 |
Mold for nano imprinting |
Torbjörn Ling, Lars Montelius |
2005-08-02 |
| 6423207 |
Method and apparatus for etching |
Lennart Olsson |
2002-07-23 |
| 6245213 |
Method for anisotropic etching of structures in conducting materials |
Lennart Olsson |
2001-06-12 |
| 6125183 |
Cryptosystem for optical storage |
Rizgar Jiawook, Lennart Olsson |
2000-09-26 |