Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Metal complexes of polydentate beta-ketoiminates

Metal complexes of polydentate beta-ketoiminates

US Patent 7947814 · Granted May 24, 2011

Estimated economic value: $31,460,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Compositions and methods using same for deposition of silicon-containing film2025
Composition for high temperature atomic layer deposition of high quality silicon2025
Group V and VI transition metal precursors for thin film deposition2025
Compositions and methods using same for thermal deposition silicon-containing fi2025
Siloxane compositions and methods for using the compositions to deposit silicon 2025
High temperature atomic layer deposition of silicon-containing film2025
Compositions comprising silacycloalkanes and methods using same for deposition o2025
Organoaminosilane precursors and methods for depositing films comprising same2025
Methods for depositing a conformal metal or metalloid silicon nitride film2024
Compositions and methods using same for deposition of silicon-containing film2024
Organoamino-functionalized cyclic oligosiloxanes for deposition of silicon-conta2024
Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of si2024