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Home › Memory medium storing original data generation program, memory medium storing illumination condition determination program, original data generation method, illumination condition determination method, and device manufacturing method

Memory medium storing original data generation program, memory medium storing illumination condition determination program, original data generation method, illumination condition determination method, and device manufacturing method

US Patent 7927773 · Granted Apr 19, 2011

Estimated economic value: $106,000 ⓘ

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