Silent discharge plasma apparatus

Assignee

• Mitsubishi Electric

Inventors

• Noboru Wada (25 patents)
• Masaki Kuzumoto (39 patents)
• Hajime Nakatani (33 patents)
• Hiroyuki Igehara (1 patents)
• Norimitsu Esaki (4 patents)
• Shingo MINE (2 patents)
• Taichiro Tamida (25 patents)

View full patent text on Google Patents →