Imprint lithography

Assignee

• Asml Netherlands B.V.

Inventors

• Yvonne Wendela Kruijt-Stegeman (59 patents)
• Henricus Wilhelmus Aloysius Janssen (8 patents)
• Aleksey Yurievich Kolesnychenko (86 patents)
• Helmar Van Santen (88 patents)

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