Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Holding apparatus and exposure apparatus

Holding apparatus and exposure apparatus

US Patent 7907358 · Granted Mar 15, 2011

Estimated economic value: $119,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Imprint apparatus, imprinting method, and product manufacturing method2023
Imprint apparatus, imprint method, and article manufacturing method2022
Imprint apparatus, imprint method, and method of manufacturing article2021
Imprint apparatus, control method, and method for manufacturing article2020
Mold, imprint apparatus, and method of manufacturing article2019
Optical element holding system, barrel, exposure apparatus, and device manufactu2008
Optical element holding system, barrel, exposure apparatus, and device manufactu2006
Retainer, exposure apparatus, and device fabrication method2006