Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Retainer, exposure apparatus, and device fabrication method

Retainer, exposure apparatus, and device fabrication method

US Patent 7031082 · Granted Apr 18, 2006

Estimated economic value: $237,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Imprint apparatus, imprinting method, and product manufacturing method2023
Imprint apparatus, imprint method, and article manufacturing method2022
Imprint apparatus, imprint method, and method of manufacturing article2021
Imprint apparatus, control method, and method for manufacturing article2020
Mold, imprint apparatus, and method of manufacturing article2019
Holding apparatus and exposure apparatus2011
Optical element holding system, barrel, exposure apparatus, and device manufactu2008
Optical element holding system, barrel, exposure apparatus, and device manufactu2006