{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "MEMS vibrating structure using a single-crystal piezoelectric thin-film layer having domain inversions", "item": "https://www.patentleaderboard.com/patent/7898158"}]}

Home › MEMS vibrating structure using a single-crystal piezoelectric thin-film layer having domain inversions

MEMS vibrating structure using a single-crystal piezoelectric thin-film layer having domain inversions

US Patent 7898158 · Granted Mar 1, 2011

Estimated economic value: $9,989,000 ⓘ

Assignee

Rf Micro Devices

Inventors

Sheng-Shian Li (18 patents)
Seungbae Lee (22 patents)
Kushal Bhattacharjee (32 patents)

View full patent text on Google Patents →