Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Calibration methods, lithographic apparatus and patterning device for such lithographic apparatus

Calibration methods, lithographic apparatus and patterning device for such lithographic apparatus

US Patent 7889314 · Granted Feb 15, 2011

Estimated economic value: $4,533,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of controlling a position of a first object relative to a second object, 2023
Position measurement system, grating for a position measurement system and metho2017
Lithographic apparatus, device manufacturing method and displacement measurement2017
Substrate positioning system, lithographic apparatus and device manufacturing me2016
Position measurement system, lithographic apparatus and device manufacturing met2014
Lithographic apparatus and method for correcting a position of a stage of a lith2014
Measurement system, method and lithographic apparatus2014
Stage system, lithographic apparatus including such stage system, and correction2013
Lithographic projection apparatus and method for controlling a support structure2012
Method of operating a lithographic processing machine, control system, lithograp2010
Lithographic apparatus and device manufacturing method2009
Lithographic apparatus and method for determining Z position errors/variations a2008