Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Electrode sheet for electrostatic chuck, and electrostatic chuck

Electrode sheet for electrostatic chuck, and electrostatic chuck

US Patent 7881036 · Granted Feb 1, 2011

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Switch simulation device2025
Method for manufacturing bonded wafer2018
Cooperative communication/broadcasting system, application management server, re2015
Bipolar electrostatic chuck2014
Two-sided attraction structure, exhibiting or indicating apparatus using same, d2014
Method for inspecting electrostatic chuck, and electrostatic chuck apparatus2013
Substrate suction apparatus and method for manufacturing the same2013
Electrostatic chuck2013
Bipolar electrostatic chuck2012
Bipolar electrostatic chuck2012
Apparatus for removing foreign material from substrate and method for removing f2012
Apparatus for removing foreign material from substrate and method for removing f2012