Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Helical pixilated photoresist

Helical pixilated photoresist

US Patent 7875415 · Granted Jan 25, 2011

Estimated economic value: $27,856,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Wafer processing equipment having capacitive micro sensors2021
Wafer processing equipment having capacitive micro sensors2018
Forming semiconductor structures2013
Pixelated photoresists2011
Photoactive adhesion promoter in a slam2010
Photoactive adhesion promoter in a SLAM2010
Methods and compositions for providing photoresist with improved properties for 2010
Sealing porous dielectric materials2010
Branching self-assembling photoresist with decomposable backbone2009
Photoactive resist capping layer2009
Photoactive adhesion promoter2009
Method to modulate etch rate in SLAM2009