Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and system for advanced process control using a combination of weighted relative bias values

Method and system for advanced process control using a combination of weighted relative bias values

US Patent 7869894 · Granted Jan 11, 2011

Estimated economic value: $5,518,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods of error detection in fabrication processes2019
Methods of error detection in fabrication processes2019
Method and apparatus for extracting dose and focus from critical dimension data2012
Method and apparatus for optimizing models for extracting dose and focus from cr2011
Method and system for advanced process control using measurement uncertainty as 2010
Method and system for randomizing wafers in a complex process line2010
Method and apparatus for compensating metrology data for site bias prior to filt2010
Method and apparatus for metrology sampling using combination sampling rules2009
Method and apparatus for selecting sites for sampling2008
Method and system for controlling a product parameter of a circuit element2007
Technique for enhancing accuracy of critical dimensions of a gate electrode by u2006
Method of measuring implant profiles using scatterometric techniques2006