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Home › System and method for semiconductor processing

System and method for semiconductor processing

US Patent 7867905 · Granted Jan 11, 2011

Estimated economic value: $87,000 ⓘ

Assignee

Tegal

Inventors

Tue Nguyen (105 patents)
Tai Dung Nguyen (33 patents)
Craig Bercaw (26 patents)

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