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Home › Method and apparatus for fabricating high temperature superconducting film through auxiliary cluster beam spraying, and high temperature superconducting film fabricated using the method

Method and apparatus for fabricating high temperature superconducting film through auxiliary cluster beam spraying, and high temperature superconducting film fabricated using the method

US Patent 7838061 · Granted Nov 23, 2010

Estimated economic value: $5,463,000 ⓘ

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