Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Optical element positioning apparatus, projection optical system and exposure apparatus

Optical element positioning apparatus, projection optical system and exposure apparatus

US Patent 7821726 · Granted Oct 26, 2010

Estimated economic value: $296,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Control apparatus, imprint apparatus, and method of manufacturing article2025
Motion control apparatus, lithography apparatus, planarization apparatus, proces2024
Forming apparatus, forming method, and article manufacturing method2024
Feedback control device that suppresses disturbance vibration using machine lear2023
Imprinting apparatus, imprinting method, method for producing article, substrate2023
Imprint method, imprint apparatus, and article manufacturing method2023
Estimation method, estimation model generation method, program, and estimation d2022
Imprint method and method for manufacturing article2022
System and method for adjusting a position of a template2021
Vibration control apparatus, lithography apparatus, and method of manufacturing 2019
Imprint apparatus, foreign particle removal method, and method of manufacturing 2019
Pharmaceutical for prophylaxis or treatment of hypertension2018