Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for obtaining improved feedforward data, a lithographic apparatus for carrying out the method and a device manufacturing method

Method for obtaining improved feedforward data, a lithographic apparatus for carrying out the method and a device manufacturing method

US Patent 7818073 · Granted Oct 19, 2010

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Control system, method to increase a bandwidth of a control system, and lithogra2022
Lithographic apparatus and device manufacturing method2019
Lithographic apparatus and device manufacturing method2014
Position control system, lithographic apparatus, and method to control a positio2014
Control system, lithographic apparatus and a method to control a position quanti2014
Controller for a positioning device, method for controlling a positioning device2013
Lithographic apparatus and control system2013
Stage system and lithographic apparatus comprising such stage system2012
Controller for a positioning device, method for controlling a positioning device2012
Lithographic apparatus and device manufacturing method2011
Vibration isolation system2010
System and method for moving a component through a setpoint profile, lithographi2010