Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Pattern inspection apparatus, image alignment method, displacement amount estimation method, and computer-readable recording medium with program recorded thereon

Pattern inspection apparatus, image alignment method, displacement amount estimation method, and computer-readable recording medium with program recorded thereon

US Patent 7809181 · Granted Oct 5, 2010

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Pattern inspection apparatus, pattern inspection method, and computer-readable r2012
Pattern inspection apparatus, corrected image generation method, and computer-re2012
Semiconductor device and method for fabricating the same2011
Circuit simulation method2010
Semiconductor device2010
Target workpiece inspection apparatus, image alignment method, and computer-read2010
Sample inspection apparatus, image alignment method, and program-recorded readab2009
Mask layout design improvement in gate width direction2009
Pattern inspection apparatus2009
Data searching system, method of synchronizing metadata and data searching appar2009
Semiconductor integrated circuit2009
Pattern inspection apparatus2008