Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › MEMS piezoelectric switch

MEMS piezoelectric switch

US Patent 7786653 · Granted Aug 31, 2010

Estimated economic value: $19,911,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Tapered magnetic ion transport tunnel for particle collection2023
Radiation shield2020
Space ion analyzer with mass spectrometer on a chip (MSOC) using floating MSOC v2019
Radio-frequency carbon-nanotube field effect transistor devices with local backg2019
Lateral over-moded bulk acoustic resonators2015
Method and apparatus for removing metallic nanotubes without transferring carbon2014
Method of manufacturing a micro-electrical-mechanical system with thermally isol2011
Thin film encapsulation of MEMS devices2011
Miniature mass spectrometer for the analysis of chemical and biological solid sa2010
Miniature mass spectrometer for the analysis of biological small molecules2010
Thin film encapsulation of MEMS devices2009
Systems and methods for use in detecting harmful aerosol particles2009