Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of manufacturing a micro-electrical-mechanical system with thermally isolated active elements

Method of manufacturing a micro-electrical-mechanical system with thermally isolated active elements

US Patent 7989249 · Granted Aug 2, 2011

Estimated economic value: $19,238,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Articulating spacecraft chassis2025
Radio-frequency carbon-nanotube field effect transistor devices with local backg2019
Geospatial imaging system providing segmentation and classification features and2017
Staring focal plane sensor systems and methods for imaging large dynamic range s2015
Lateral over-moded bulk acoustic resonators2015
CMOS and CCD sensor R/O with high gain and no kTC noise2015
Method and apparatus for removing metallic nanotubes without transferring carbon2014
Scanning focal plane sensor systems and methods for imaging large dynamic range 2014
Staring focal plane sensor systems and methods for imaging large dynamic range s2014
Variable charge coupled device focal plane array2013
Series diode electro-thermal circuit for ultra sensitive silicon sensor2013
Indium tin oxide gate charge coupled device2013