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Home › Raised STI process for multiple gate ox and sidewall protection on strained Si/SGOI sructure with elevated source/drain

Raised STI process for multiple gate ox and sidewall protection on strained Si/SGOI sructure with elevated source/drain

US Patent 7737502 · Granted Jun 15, 2010

Estimated economic value: $4,416,000 ⓘ

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