Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Film deposition apparatus, film deposition method, monitoring program for film deposition apparatus, and recording medium thereof

Film deposition apparatus, film deposition method, monitoring program for film deposition apparatus, and recording medium thereof

US Patent 7718926 · Granted May 18, 2010

Estimated economic value: $117,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Reflective mask blank, reflective mask, method of manufacturing reflective mask 2024
Resin-metal composite seal container and method for producing same2018
Liquid material evaporation apparatus for semiconductor manufacturing2006
Method and apparatus for rejuvenating polishing slurry2003
Method for fabricating semiconductor device2001