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Home › Compact duct system incorporating moveable and nestable baffles for use in tools used to process microelectronic workpieces with one or more treatment fluids

Compact duct system incorporating moveable and nestable baffles for use in tools used to process microelectronic workpieces with one or more treatment fluids

US Patent 7681581 · Granted Mar 23, 2010

Estimated economic value: $3,299,000 ⓘ

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