Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for producing annealed wafer and annealed wafer

Method for producing annealed wafer and annealed wafer

US Patent 7659216 · Granted Feb 9, 2010

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for evaluating oxide dielectric breakdown voltage of a silicon single cry2013
Method for evaluating dopant contamination of semiconductor wafer2009
Method of producing annealed wafer and annealed wafer2007
Method of producing annealed wafer and annealed wafer2006
Annealed wafer manufacturing method and annealed wafer2005
Method for manufacturing single-crystal-silicon wafers2004
Production method for annealed wafer2003
Method of manufacturing a single crystal thin film1997
Apparatus for growing silicon epitaxial layer1996
Process for growing silicon epitaxial layer1995
Pattern shift measuring method1992
Pattern shift measuring method1992