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Home › Layer and system with a silicon layer and a passivation layer, method for production of a passivation layer on a silicon layer and use thereof

Layer and system with a silicon layer and a passivation layer, method for production of a passivation layer on a silicon layer and use thereof

US Patent 7642545 · Granted Jan 5, 2010

Estimated economic value: $4,730,000 ⓘ

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