Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Interconnection pattern inspection method, manufacturing method of semiconductor device and inspection apparatus

Interconnection pattern inspection method, manufacturing method of semiconductor device and inspection apparatus

US Patent 7640138 · Granted Dec 29, 2009

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Multibeam scanning apparatus and multibeam scanning method2023
Antitumor agent2022
Defect inspection apparatus and defect inspection method2020
Inspection apparatus and inspection method2020
Pattern inspection method using charged particle beam2019
Signal processing method and signal processing apparatus2018
Cancer stem cell proliferation inhibitor and intracellular active oxygen accumul2017
Defect inspection apparatus, defect inspection method, and semiconductor device 2013
Pattern inspection method, pattern inspection apparatus and semiconductor device2012
Pattern inspection apparatus, pattern inspection method, and manufacturing metho2012
Reclining device2010
Charged particle beam apparatus, defect correcting method, etching method, depos2010