Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Exposure apparatus and device fabrication method using the same

Exposure apparatus and device fabrication method using the same

US Patent 7626680 · Granted Dec 1, 2009

Estimated economic value: $388,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Electrochemical element, electrochemical module, electrochemical device, and ene2025
Particle size distribution measuring apparatus and particle size distribution me2025
Particle size distribution measurement device, particle analysis unit, program f2024
Method for generating data for particle analysis, program for generating data fo2024
Particle size distribution measuring device and program for particle size distri2024
Polyvinyl alcohol-degrading enzyme and process for producing the same2024
Imprint method, imprint apparatus, imprint system, and method of manufacturing a2022
Particle size distribution measuring device and program for particle size distri2022
Particle size distribution measurement device and program for a particle size di2022
Particle size distribution measurement device and program for a particle size di2021
Optical measurement cell and particle properties measuring instrument using the 2020
Vehicle and manufacturing method of vehicle2018