Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Reticle pod with isolation system

Reticle pod with isolation system

US Patent 7607543 · Granted Oct 27, 2009

Estimated economic value: $7,255,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Filter apparatus with vented core2025
Reticle pod with window2024
Electrostatic discharge mitigation tubing2024
Filter cartridge, apparatus, and methods2024
Reticle pod having side containment of reticle2024
Filter with improved fluid flow2024
Filter apparatus with vented core2024
Modular filter manifold2023
Fluid circuit with integrated electrostatic discharge mitigation2022
Substrate container with improved substrate retainer and door latch assist mecha2020
Wafer container with latching mechanism for large diameter wafers2020
Substrate container with enhanced containment2020