Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Ion implantation apparatus and method for obtaining non-uniform ion implantation energy

Ion implantation apparatus and method for obtaining non-uniform ion implantation energy

US Patent 7576339 · Granted Aug 18, 2009

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Connector apparatus2022
Apparatus and method for automatically converting user interface2019
Method of forming regions with hot and cold implants2017
Semiconductor device and method for fabricating the same2016
Method for implanting ions in semiconductor device2015
Method for implanting ions in semiconductor device2015
MOS transistor suppressing short channel effect and method of fabricating the sa2014
Method for manufacturing a transistor for preventing or reducing short channel e2014
Non-uniform ion implantation apparatus and method thereof2013
Non-uniform ion implantation apparatus and method thereof2013
Method of fabricating a landing plug in a semiconductor device2012
Method of fabricating a MOS transistor having a gate insulation layer with a lat2012