Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › System and apparatus for real-time monitoring and control of sputter target erosion

System and apparatus for real-time monitoring and control of sputter target erosion

US Patent 7566384 · Granted Jul 28, 2009

Estimated economic value: $83,559,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method, system and device for acquisition and processing of elastic waves and fi2024
Individualized solid dosage products and a system and method for the globally in2024
Method and apparatus for ultrasonic delivery of drugs and contrast agents2023
Method, system and device for real-time in-situ additive manufacturing monitorin2021
Individualized solid dosage products and a system and method for the globally in2020
Methods and systems for in-and out-of-die monitoring and characterization of mul2019
Integrated intra-dermal delivery, diagnostic and communication system2019
Method and system for real-time vibroacoustic condition monitoring and fault dia2018
Methods and systems for in-and out-of-die monitoring and characterization of mul2017
Integrated intra-dermal delivery, diagnostic and communication system2015
Non-contact mechanical property determination of drug tablets2014
Characterization tools for toner adhesion and adhesion distribution2012