Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7566384 | System and apparatus for real-time monitoring and control of sputter target erosion | Cetin Cetinkaya, Bjoern Pigur | 2009-07-28 |
| 6638402 | Ring-type sputtering target | Daniel R. Marx, Alfred Snowman, Charles Fisher | 2003-10-28 |