Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › DUV laser annealing and stabilization of SiCOH films

DUV laser annealing and stabilization of SiCOH films

US Patent 7560794 · Granted Jul 14, 2009

Estimated economic value: $8,070,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Co-packaged optical module2024
Conductive heat spreader and heat sink assembly for optical devices2021
High-density, fail-in-place switches for computer and data networks2020
Damage-free self-limiting through-substrate laser ablation2019
High-density, fail-in-place switches for computer and data networks2019
Tag with tunable retro-reflectors2019
Conductive heat spreader and heat sink assembly for optical devices2019
Polarization rotator for silicon photonics2018
Optical waveguide structure with waveguide coupler to facilitate off-chip coupli2018
Through-substrate optical coupling to photonics chips2017
Tag with tunable retro-reflectors2017
Controlling fragmentation of chemically strengthened glass2017