Ion implanter with etch prevention member(s)

Assignee

• Samsung

Inventors

• Il-Kyoung Kim (14 patents)
• No-Hyun Huh (5 patents)
• Tae Won Lee (79 patents)
• Sung-wook Park (189 patents)
• Ki-Young Yun (12 patents)
• Won-Soon Lee (2 patents)
• Young-Ha Yoon (3 patents)
• Tae-Sub Im (2 patents)

View full patent text on Google Patents →