Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Deposition over mixed substrates using trisilane

Deposition over mixed substrates using trisilane

US Patent 7547615 · Granted Jun 16, 2009

Estimated economic value: $13,661,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Silica scale inhibitors2024
Selective deposition on silicon containing surfaces2023
Deposition of amorphous silicon-containing films2014
Process for deposition of semiconductor films2013
System for control of gas injectors2012
Process for deposition of semiconductor films2011
Method to form ultra high quality silicon-containing compound layers2011
Deposition from liquid sources2011
Thin films and methods of making them2011
Integration of high k gate dielectric2010
Deposition from liquid sources2010
Method to form ultra high quality silicon-containing compound layers2010