Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Spatial light modulator using an integrated circuit actuator and method of making and using same

Spatial light modulator using an integrated circuit actuator and method of making and using same

US Patent 7525718 · Granted Apr 28, 2009

Estimated economic value: $2,462,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Pellicle and pellicle assembly2024
Pellicle and pellicle assembly2022
Pellicle and pellicle assembly2021
Pellicle and pellicle assembly2019
Method of using deformable mirror using piezoelectric actuators formed as an int2016
Linear motor magnetic shield apparatus for lithographic systems2015
Linear motor magnetic shield apparatus2015
Method of using deformable mirror using piezoelectric actuators formed as an int2015
Cooling of actuator coils2015
Method utilizing an electrooptic modulator2014
Method utilizing an electrooptic modulator2014
Illumination system with low telecentricity error and dynamic telecentricity cor2011