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Home › Porous silicon for isolation region formation and related structure

Porous silicon for isolation region formation and related structure

US Patent 7511317 · Granted Mar 31, 2009

Estimated economic value: $5,042,000 ⓘ

Assignee

IBM

Inventors

Thomas N. Adam (118 patents)
Stephen W. Bedell (347 patents)
Joel P. de Souza (133 patents)
Kathryn T. Schonenberg (54 patents)
Thomas A. Wallner (19 patents)

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